Roughening Treatment of the Polishing Surface of Oxygen Free Copper Using NaCl-Electrolytic Oxidizing Water
نویسندگان
چکیده
This paper discusses the surface modification processing of polished oxygen free copper using NaCl-electrolytic oxidizing water (hereinafter to as EO water). First, unheated test pieces were roughened by immersion with and without ultrasonic NaCl while comparing HCl solution. The after roughening treatment was observed FE-SEM measured AFM. results showed that has a stronger effect than solution, becomes when ultrasonic. When ultrasonic, roughness can be controlled immersing time into water. Next, residual abrasive material (Al2O3) chlorine contamination on quantitatively evaluated based EDS analysis results. compared Na2SO4 water, gives following. Without amount is similar, considerably large. With dramatically reduced, same. By this study, we received suggestion could applied copper.
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ژورنال
عنوان ژورنال: Seimitsu Ko?gakkaishi
سال: 2023
ISSN: ['0912-0289', '1882-675X']
DOI: https://doi.org/10.2493/jjspe.89.121